Tungsten and tungsten-SiC coating of ion by CVD.
نویسندگان
چکیده
منابع مشابه
Properties and Practical Results of Tungsten Carbide Coating Produced by Low Temperature Cvd Process
In forming tungsten carbide layer by low temperature and vacuum CVD, uniformity of film thickness, adhesion and gloss achieved when the effective zone of coating set is increased to 4450 x 1,100mm is described. Characteristics of tungsten carbide layer are evaluated and compared with other materials. Some practical applications to the mechanical parts of plastic injection molding machines are i...
متن کاملEffect of Tungsten Nanolayer Coating on Si Electrode in Lithium-ion Battery
Tungsten (W) was coated onto a silicon (Si) anode at the nanoscale via the physical vaporization deposition method (PVD) to enhance its electrochemical properties. The characteristics of the electrode were identified by scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray analysis, and electron probe X-ray microanalysis. With the electrochemical pr...
متن کاملSeed growth of tungsten diselenide nanotubes from tungsten oxides.
We report growth of tungsten diselenide (WSe2) nanotubes by chemical vapor deposition with a two-zone furnace. WO3 nanowires were first grown by annealing tungsten thin films under argon ambient. WSe2 nanotubes were then grown at the tips of WO3 nanowires through selenization via two steps: (i) formation of tubular WSe2 structures on the outside of WO3 nanowires, resulting in core (WO3)-shell (...
متن کاملHigh-Quality Tungsten Films by Hotwire-Assisted CVD/ALD at Low Temperature
There is a growing interest in atomic layer deposition (ALD) of metals for ultra-large-scale integrated circuit (ULSIC) manufacturing. Radical-enhanced ALD (REALD) utilizing plasma (PEALD) has been proposed to grow a number of metals [1]. In our work, we investigate an alternative approach to REALD without plasma, i.e. replacing plasma by a hot (up to 2000 oC) tungsten (W) wire. In this so-call...
متن کاملTungsten toxicity.
There is emerging evidence that tungsten has toxic health effects. We summarize the recent tungsten toxicity research in this short review. Tungsten is widely used in many commercial and military applications because it has the second highest melting temperature of any element. Consequently, it is important to elucidate the potential health effects of tungsten.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Metal Finishing Society of Japan
سال: 1988
ISSN: 1884-3395,0026-0614
DOI: 10.4139/sfj1950.39.86